Cleanroom Facility

Precision Fabrication in a Cleaner Environment

Supporting high-performance nano/micro device research at UNT Discovery Park

The Cleanroom Facility at the University of North Texas provides a controlled, particle-free environment for developing and fabricating nano/micro-scale devices, thin films, and photomasks. Located in Discovery Park, this 2,600 sq. ft. cleanroom supports both fundamental research and real-world applications in microelectronics and materials science.

Key Features & Capabilities

• Device Engineering: Build and refine micro- and nano-devices for sensors, MEMS, and advanced electronics.

• Cleanroom Standards: Class 100 lithography and Class 10,000 processing spaces maintain high-integrity conditions for fabrication.

• Tool Development: Support for the creation and refinement of fabrication tools and processes.

Equipment Highlights

• Electron Beam Lithography / SEM

• Heidelberg DWL 66 Maskless Laser Lithography

• Ion-Assisted Electron Beam + Sputtering Deposition

• Reactive Ion Etchers

• Laurell Spin Coaters & Wet Benches

• Trovato Thermal Evaporator (12-source with co-deposition)

• KLA-Tencor Profilometer

Collaboration & Access

As a shared-use facility, the CMEE Cleanroom enables hands-on learning for students, interdisciplinary research across engineering and materials science, and industry-academic partnerships. Our experts offer training and support for researchers and partners developing high-precision technologies for extreme environments.

Ready to work in the Cleanroom?

Contact us or request access to get started with training or project onboarding.